Goals from Philipp Lahm, Sami Khedira, Miroslav Klose and Marco Reus gave three-times winners Germany a 4-2 win over Greece in their quarter-final Friday.
Defender Lahm broke the deadlock with a sizzling drive six minutes before the interval.
Dimitris Salpingidis laid on an equaliser for Giorgos Samaras ten minutes after the restart. But Khedira restored the lead on the hour with a thumping drive that ripped past overworked Greek keeper Michalis Sifakis before a Klose header and a Reus drive wrapped things up.
A last-gasp Salpingidis penalty was scant Greek consolation as Germany moved into a semi-final against either England or Italy.
Klose had an early effort chalked off for offside in the opening period as the Germans dominated the early exchanges before watching German Chancellor Angela Merkel, who raced to Poland after a meeting of top eurozone economies in Rome.